Dr Suresh Singaram
Head of Asian Technical Task Force
Evatec SEA
Dr Suresh Kumar Singaram has been in the semiconductor equipment business for 20 years holding various roles in engineering, product management, global technical support and operations. Dr Kumar currently heads a regional team in Evatec SEA which provides software support, advanced process development as well new platform/technology transfer from Evatec HQ into the region. Dr Kumar’s current interests include the use of AI and machine learning for advanced analytics in process control as well as diagnostics. Dr Kumar holds a PhD in Plasma Physics from Nanyang Technological University Singapore.
PVD Solutions for Heterogeneous Integration
16 May 2024 1040 - 1100
Physical Vapor Deposition (PVD) solutions play a crucial role in the field of heterogeneous integration, a process that combines different components with varying functionalities into a single system.
PVD methods, such as sputtering and evaporation, are used to deposit thin films of materials onto substrates, enabling the integration of diverse components on a micro or nano scale. These methods offer high precision, uniformity, and repeatability, making them ideal for applications in microelectronics, photonics, and MEMS.
Heterogeneous integration through PVD can lead to devices with improved performance, reduced size, and lower power consumption. It also opens up possibilities for the integration of novel materials and structures, paving the way for advancements in various fields such as IoT, AI, and healthcare.
However, challenges remain in terms of material compatibility, interface quality, and process control. In this paper, we highlight the various solutions available in Evatec to address some of the challenges in this rapidly growing area.
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*Please note that the event schedule is subject to change without prior notice.
The event is organised by Technology Development Centre at ITE College Central
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